Inspection Microscopes

The new series of Nikon LSI inspection microscopes, Eclipse L200N and L200ND, is available. Building on the high resolution and precision of the Eclipse L200 and L200D series, the new ones offer improved observation and operating performance, providing images with greater contrast and higher resolving power. Used independently or in combination with wafer loaders, the L200 series performs exceptionally precise optical inspection of wafers, photo masks, reticules and other substrates. Nikons original CFI60 optics provide both image brightness through higher NAs, and wider sample range and access with longer WDs. The technology ensures that the Eclipse L200N, in combination with the NWL200 wafer loader, offers safe, reliable automated loading of ultra-thin 100 ?m wafers for inspection.