Micro positioning in high vacuum

An increasing number of processes within the semi-conductor industry or in research are performed under vacuum conditions to provide an extremely pure environment. For the applied drive technology this is a special challenge because the use under vacuum conditions can cause special problems, e.g. conventional lubricants or conventional gear materials cannot be used any more.

The Micro Harmonic Drive® gear which is available in different configurations and with different reduction ratios now has proven its vacuum compatibility since it pro-vides highest precision and positioning accuracy even under vacuum conditions. For the output bearing dry lubrication is applied. The pure-metal components make it resistant to corrosion and wear and tear. In order to enable an easy integration of the gear into the individual machine or product environment, the Micro Harmonic Drive gearbox is available in various different configurations and either combined with a micromotor from Arsape or Phytron.

The Micro Harmonic Drive® gearbox provides a peak torque up to 40 mNm and an outer diameter of only 10 mm. The reduction ratio ranges from 160:1 up to 1000:1. Further applications are in the area of photonics, medical technology, optical communication, semi-conductor manufacturing or aerospace.