at minimum costs
FIBLYS (or FIB anaLYSis) is a project to design and build united nano-structuring, nano-manipulation, nano-analytic and nano-vision capabilities in one unique ‘multi-nano’ tool. It is based on a dual Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) together with Atomic Force Microscope (AFM).
FIB enables modification of samples, SEM fast real-time imaging while AFM provides the depth information. This core of excellent nano-vision ability is further improved by analytical capabilities combined in a modular system, such as Energy Dispersive X-ray Spectrometer (EDX), Electron Back-Scatter Diffraction (EBSD), Time-of-Flight Mass Spectrometry (TOF) and others.