Magellan XHR SEM Family

FEI's Magellan™ XHR SEM, our newest family of scanning electron microscopes, allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer. Most importantly, the Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below. Across the board, the Magellan Family extends the range of nanoscale imaging and analysis, with the speed and ease-of-use of traditional SEMs.

Advantages and Capabilities
Sub-nanometer resolution has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing. The Magellan Family extends this capability to applications that were previously impossible or impractical with conventional SEM, transmission electron microscope (TEM) or focused ion beam (FIB) systems.

The Magellan Family's performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage and high stability platform with fully configurable analytical chamber. The stage readily accommodates large samples or multiple smaller samples, while providing fast, accurate navigation and unequaled stability.

Featured Tools in the Magellan Family
The Magellan Family comes in two models: The Magellan 400 is optimized for scientific research while the Magellan 400L is optimized for semiconductor labs. The semiconductor lab model comes with a load-lock feature that speeds-up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit. Both models have an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs.

Applications with Magellan Family Models
The Magellan family of microscopy tools are excellent performers for applications similar to the following:

ELECTRONICS