White Light Interferometer with Integrated Multi-Sensor Concept

The TopMap Pro.Surf from Polytec is a white light interferometer especially designed for large area measurement. Single measurement volume (without stitching) of 30 x 40 x 70 mm3 can be acquired with a vertical resolution in nanometer range and with a high lateral resolution. For the applications in which an even higher lateral resolution is required (e.g. an additional measurement to evaluate roughness), a multi-sensor concept integrated with chromatic confocal probing is available.