Linear Nanopositioning Systems

With travel ranges up to 80 µm and a direct piezo actuator drive, the P-630 stages from Physik Instrumente reach high scanning frequencies and settling times of only a few milliseconds. At a width of 50 mm, their clear aperture is relatively large with a diameter of 30 mm.

The drive technology of the systems is based on all-ceramic insulated PICMA piezo actuators. Optimum control properties are ensured via the single-channel E-709.CHG Motion Controller. The compact positioning stages are perfectly suited for use in sensor heads or precision motion of objects in optical and tactile metrology as well as for microstructuring.