Pumps for Vacuum Quality Monitor

Edwards Group is to supply the EXT75DX compound turbomolecular pump to Granville-Phillips to form a part of their 835 Vacuum Quality Monitor (VQM) Differential Pump System.

It provides real-time information that can be used to optimize physical vapor deposition, ion implant, reactive ion etch and any vacuum dependent process, particularly in solar and semiconductor manufacturing, and also for vacuum system monitoring and diagnostics in a wide range of other vacuum processes in thin film coating, research and development, high energy physics or other applications where precise understanding of the vacuum environment is critical.