Z-axis Positioner for High Performance White Light Interferometry

The MIPOS 16-158 from piezosystem jena is specifically designed for high precision positioning of optical systems with an accuracy in the sub-nanometer range. The high resolution and fast response time of the positioner offer new possibilities for interferometry. Based on its design with a 104 mm aperture and a stage height of 42 mm, the positioner offers technical specifications matching the requirements of white light interferometry. It can achieve a focus range up to 16 μm and single step resolution of less than 0.1 nm, while operating in a voltage range between – 20 and 130 V.