Tritor 102 CAP from piezosystem jena is a 3D piezo positioning system with a free central hole of 40 mm. Each axis is mechanically pre-loaded which, in combination with the parallelogram design, provides highly accurate and precise motion. Equipped with solid state hinges, the Tritor 102 CAP guarantees long term reliability.
The design is highly compact but offer motion of up to 100 μm in all three axes. Its integrated capacitive measurement system and high resolution in the nm and sub-nm range make this stage suitable for a wide range of applications.