X-Ray Spectroscopy Enables Elemental Mapping at the Atomic-Level

FEI Company has announced that elemental mapping at the atomic-level is now possible across the periodic table using ChemiSTEM Technology. The combination of increased current in an atomic-sized probe by Cs-correction and the increase in X-ray detection sensitivity and beam current of the ChemiSTEM Technology allows results to be obtained within minutes.

The Technology achieves a factor of 50 or more enhancement in speed of EDX elemental mapping on scanning/transmission electron microscopes (S/TEMs) compared to conventional technology employing standard EDX Silicon-drift detectors (SDDs) and standard Schottky-FEG electron sources.