M-683 precision micropositioning stages make use of PILine ultrasonic piezo linear motors enabling a compact design and low profile. An integrated linear encoder enables closed-loop control with 0.1 µm resolution. The M-683 translation stages use paired crossed-roller bearings mounted on ground-aluminum profiles for better guiding accuracy.
Integrated U-164 PILine linear motors provide push forces to 6 N and a maximum velocity of up to 350 mm/s. A vacuum version is available. The stages can be arranged to form compact XY systems. If an additional Z-axis is required, the M-110 micro-stage series is recommended due to its higher holding force. The M-683 design is scalable and can be extended to provide longer travel ranges to 300 mm.