Big Vacuum Chamber, Deep Insights

The vacuum chamber of the new Auriga 60 platform from Carl Zeiss SMT is large enough to handle wafers of up to six inch diameter, at the same time. The huge chamber offers the capability to attach up to 23 analytical or other attachments for diverse chemical or physical experiments. For example, external imaging and analytic detectors like EDX, EBSD and SIMS can be connected. In particular, the novel workstation permits a direct cryogenic transfer and examination of deep-frozen specimen.