Ultra-High Resolution Field-Emission SEM

With the Nova NanoSEM 50 series, FEI Company is introducing a series of ultra-high resolution scanning electron microscopes (UHR SEMs).In addition to the combination of advanced optics (including a two-mode final lens), SE/BSE (Secondary Electrons/Backscattered Electrons) in-lens detection and beam deceleration, the Nova NanoSEM 50 series introduces a new suite of latest generation, high sensitivity retractable SE/BSE and STEM detectors, as well as versatile SE/BSE filtering capabilities, to optimize the information of interest. Intelligent scanning modes are available to minimize imaging artefacts.