Analysis and High Resolution in One

The Merlin FE-SEM overcomes the conflict between image resolution and analytical capability. The core of it is the enhanced Gemini II column which achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence. A key aspect of the new FE-SEM Merlin from Carl Zeiss is ease of use, for example
sample cleaning, unique charge compensation or image acquisition in less than one minute.