ULTRA plus Ultra-High-Resolution Imaging of ­Non-Conductive Samples

Ceramics, polymers, fibre optics and many more samples are not really rewarding specimens for electron microscopy, due to electrostatic charging. ULTRA plus Scanning Electron Microscope (SEM) with unique technology for charge compensation enables for the first time, high resolution, stable and noise-free images from such samples. This technological advancement was specifically developed for satisfying increasing customer demands in analytical research, development and testing of advanced materials. For the purpose of charge neutralisation, a proprietary gas-injection system enables for a local flush application of an inert gas. Thereby, electrostatic charging of samples is neutralised and detection of secondary electrons (SE) as well as backscattered electrons (BSE) becomes feasible. Numerous applications in life sciences, materials analysis and semiconductors will profit from this development.

Complete Detection System in ULTRA plus
Using the new proprietary gas-injection system, both the use of the unique in-lens SE detector as well as the in-lens EsB detector (Energy selective Backscattered) of the industry-proven ZEISS ULTRA field-emission SEM becomes possible. Thereby, for the first time non-conductive samples can be investigated in the ULTRA not only under low-voltage imaging conditions, but also at high voltage and high probe current to use the full functionality of the leading ULTRA microscope capabilities. Together with the AsB (Angle selective Backscattered) detector for low-angle backscattered electrons revealing orientation contrast as well as the chamber-mounted Everhart Thornley detector for topographical contrast, the ULTRA plus offers a complete detection system for all applications on conductive as well as non-conductive samples.

Wide Variety of Customer Specific Configurations
For meeting the various customer demands, the new and unique ULTRA plus system can be adapted to a wide variety of system specifications. There is optionally a 80 mm load lock available with a pump time of as little as 30 seconds. Also available will be a 6-axes super eucentric motorised stage with a location repeatability of 1 µm. A very useful system feature is a 100 µm beam shift, which allows the investigation of a rather large field of view without moving the sample mechanically. The OptiProbe mode enables for a continuous adjustment of the beam current from 12 pA to 40 nA. Moreover, the so-called quiet mode enables for switching off the vacuum prepump, allowing for up to 40% savings in power consumption.