Universal Resolution Test Specimen

Many modern SEMs are operated over a wide range of accelerating voltages and working distances. Changing operating parameters may significantly alter the ultimate resolution performance. Agar Scientifics universal tin on carbon resolution test specimen has been specially developed in their laboratory to enable resolution checks to be made under all operating conditions. The wide size range of tin spheres, 3nm-30µm and subsequent inter-sphere spacing, allows resolution and performance checking to be carried out over the full operating range. The largest spheres can be used for basic column alignment at low magnification. Intermediate sized spheres are useful for monitoring image shift when changing kV or resolution checking at low kV. The smallest spheres can be used for resolution assessment and astigmatism correction at the very highest magnifications.