High Resolution Scanning Electron ­Microscopy

FEI Company introduced a new class of instruments called extreme high-resolution scanning electron microscopes: The Magellan XHR SEM allows scientists and engineers to quickly see things they could not see before, such as 3D surface images at many different angles and at resolutions below one nanometer (about the size of ten hydrogen atoms, side-by-side). Most importantly, the instrument images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below. Sub-nanometer resolution has critical value in scientific research and industrial R&D. In addition, it is an absolute requirement in process development, monitoring and control applications in advanced semiconductor manufacturing. The Magellan Family extends this capability to applications that were previously impossible or impractical with conventional SEM, transmission electron microscope (TEM) or focused ion beam (FIB) systems.