Area Measurement with the SEM Now Conforms to New ISO Standards

Alicona Imaging, supplier of optical measurement and inspection systems, has launched version 5.0 of MeX, the stand alone software package to turn any SEM into a 3D measurement device. Using stereoscopic images, the software automatically retrieves 3D information and presents a robust and dense 3D dataset to perform trace­able metrology examination. The software has a number of major new and improved features and now conforms to the new ISO area analysis standards. Evaluation possibilities include parameters for surface texture, bearing ratio parameters, fractal dimension, auto correlation plus parameters derived from the gradient and spectral distribution of a surface. It also includes a renewed calculation of measurement uncertainties for each measurement point derived from tolerances of SEM input parameters. Both a new licence management and reorganized profile analysis increase the ease of use in multi user facilities. The new release also includes a data reduction utility to allow depth analysis of even very large SEM datasets.