Multi-Inlet Turbomolecular Pumps

Granting of the European patent EP 1422423 B1 is a milestone for assuring the strategic orientation of Leybold Vacuum. This patent not only specifically covers the future of the multi-inlet pumps but also the innovative type design of turbo molecular, respectively gas friction vacuum pumps by way of a cartridge solution. Up to three analysis chambers can be pumped down simultaneously by a single multi-inlet pump. These pumps have been tuned for pumping speed and gas throughput in order to attain higher detection sensitivities of analytical systems, a small footprint and an increased sample throughput, for example. The benefit offered to the customers is the compactness of the vacuum system combined with a high performance density, simple installation, stable vacuum connections and, compared to the utilisation of separate individual pumps, significantly lower investment costs for the entire system.